Imaging of ultrathin silicon dioxide layers in semiconducting devices by means of energy-filtered transmission electron microscopy

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	405-408
Journal	Institute of Physics Conference Series
Volume	180
Publication status	Published - 2004

Treatment code (Nähere Zuordnung)

@article{34790c2261104d1eaea7b153ffd4ac8f,

title = "Imaging of ultrathin silicon dioxide layers in semiconducting devices by means of energy-filtered transmission electron microscopy",

author = "Bernhard Schaffer and Werner Grogger and Ferdinand Hofer",

year = "2004",

language = "English",

volume = "180",

pages = "405--408",

journal = "Institute of Physics Conference Series",

publisher = "IOP Publishing Ltd.",

}