Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Stefan Kirnstötter; Martin Mario Faccinelli; Johannes Laven; Werner Schustereder; Hans-Joachim Schulze; Reinhart Job; Peter Hadley

doi:10.1149/04901.0475ecst

Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Stefan Kirnstötter, Martin Mario Faccinelli, Johannes Laven, Werner Schustereder, Hans-Joachim Schulze, Reinhart Job, Peter Hadley

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	483-489
Journal	ECS Transactions
Volume	49
DOIs	https://doi.org/10.1149/04901.0475ecst
Publication status	Published - 2012

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Access to Document

10.1149/04901.0475ecst

Cite this

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title = "Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current",

author = "Stefan Kirnst{\"o}tter and Faccinelli, {Martin Mario} and Johannes Laven and Werner Schustereder and Hans-Joachim Schulze and Reinhart Job and Peter Hadley",

year = "2012",

doi = "10.1149/04901.0475ecst",

language = "English",

volume = "49",

pages = "483--489",

journal = "ECS Transactions",

issn = "1938-6737",

publisher = "Electrochemical Society, Inc.",

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TY - JOUR

T1 - Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

AU - Kirnstötter, Stefan

AU - Faccinelli, Martin Mario

AU - Laven, Johannes

AU - Schustereder, Werner

AU - Schulze, Hans-Joachim

AU - Job, Reinhart

AU - Hadley, Peter

PY - 2012

Y1 - 2012

U2 - 10.1149/04901.0475ecst

DO - 10.1149/04901.0475ecst

M3 - Article

SN - 1938-6737

VL - 49

SP - 483

EP - 489

JO - ECS Transactions

JF - ECS Transactions

ER -