Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Stefan Kirnstötter, Martin Mario Faccinelli, Johannes Laven, Werner Schustereder, Hans-Joachim Schulze, Reinhart Job, Peter Hadley

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)483-489
JournalECS Transactions
Publication statusPublished - 2012

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

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