@article{c069d39fba7b414cb6d275ec82ea2346,
title = "Impact of the NO Anneal on the Microscopic Structure and Chemical Composition of the Si‐Face 4H‐SiC/SiO2 Interface",
author = "Gernot Gruber and Christian Gspan and Evelin Fisslthaler and Martina Dienstleder and Gregor Pobegen and Thomas Aichinger and Robert Meszaros and Werner Grogger and Peter Hadley",
year = "2018",
doi = "10.1002/admi.201800022",
language = "English",
volume = "5",
pages = "1800022",
journal = "Advanced Energy Materials",
issn = "1614-6832",
publisher = "Wiley-VCH ",
}