Improvement of Metallic Thin Films for HR-SEM by Using DC Magnetron Sputter Coater

Johannes Rattenberger, Alexander Melischnig, Ilse Letofsky-Papst, Thomas Ganner, Hartmuth Schröttner

Research output: Non-print formWebsite / Web publication


Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.
Original languageEnglish
PublisherLeica Microsystems
Publication statusPublished - 9 Mar 2016

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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