Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Peter Scheibelhofer; Ernst Stadlober; Günter Hayderer; Günther Leditzky

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Peter Scheibelhofer, Ernst Stadlober, Günter Hayderer, Günther Leditzky

Institute of Statistics (5060)

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties
Place of Publication	Kyiv
Publisher	Faculty of Cybernetics, Taras Shevchenko National University of Kyiv
Pages	161-169
ISBN (Print)	978-80-7231-897-1
Publication status	Published - 2012
Event	PDMU-2012: XX International Conference - Brno, Czech Republic Duration: 17 Sept 2012 → 21 Sept 2012

Conference

Conference	PDMU-2012: XX International Conference
Country/Territory	Czech Republic
City	Brno
Period	17/09/12 → 21/09/12

Fields of Expertise

Information, Communication & Computing

Treatment code (Nähere Zuordnung)

Application
Experimental

Cite this

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. / Scheibelhofer, Peter; Stadlober, Ernst; Hayderer, Günter et al.
XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties. Kyiv: Faculty of Cybernetics, Taras Shevchenko National University of Kyiv, 2012. p. 161-169.

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Scheibelhofer, P, Stadlober, E, Hayderer, G & Leditzky, G 2012, Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. in XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties. Faculty of Cybernetics, Taras Shevchenko National University of Kyiv, Kyiv, pp. 161-169, PDMU-2012: XX International Conference, Brno, Czech Republic, 17/09/12.

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title = "Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication",

author = "Peter Scheibelhofer and Ernst Stadlober and G{\"u}nter Hayderer and G{\"u}nther Leditzky",

year = "2012",

language = "English",

isbn = "978-80-7231-897-1",

pages = "161--169",

booktitle = "XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties",

publisher = "Faculty of Cybernetics, Taras Shevchenko National University of Kyiv",

note = "PDMU-2012: XX International Conference ; Conference date: 17-09-2012 Through 21-09-2012",

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TY - GEN

T1 - Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

AU - Scheibelhofer, Peter

AU - Stadlober, Ernst

AU - Hayderer, Günter

AU - Leditzky, Günther

PY - 2012

Y1 - 2012

UR - http://www.PMDU.univ.kiev.ua

M3 - Conference paper

SN - 978-80-7231-897-1

SP - 161

EP - 169

BT - XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties

PB - Faculty of Cybernetics, Taras Shevchenko National University of Kyiv

CY - Kyiv

T2 - PDMU-2012: XX International Conference

Y2 - 17 September 2012 through 21 September 2012

ER -

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Other files and links

Applied Statistics

Cite this

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Other files and links

Projects

Applied Statistics

Cite this