Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Peter Scheibelhofer; Ernst Stadlober; Günter Hayderer; Günter Leditzky

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Peter Scheibelhofer, Ernst Stadlober, Günter Hayderer, Günter Leditzky

Institute of Statistics (5060)

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 17 Sep 2012
Event	PMDU-2012, XX. International Conference: Problems of Decision Making under Uncertainties - Brno, Czech Republic Duration: 17 Sep 2012 → 21 Sep 2012

Conference

Conference	PMDU-2012, XX. International Conference: Problems of Decision Making under Uncertainties
Country/Territory	Czech Republic
City	Brno
Period	17/09/12 → 21/09/12

Fields of Expertise

Information, Communication & Computing

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Scheibelhofer_PDMU2012.pdfFinal published version, 1 MB

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Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. / Scheibelhofer, Peter; Stadlober, Ernst; Hayderer, Günter et al.

2012. PMDU-2012, XX. International Conference: Problems of Decision Making under Uncertainties, Brno, Czech Republic.

Research output: Contribution to conference › (Old data) Lecture or Presentation

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title = "Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication",

author = "Peter Scheibelhofer and Ernst Stadlober and G{\"u}nter Hayderer and G{\"u}nter Leditzky",

year = "2012",

month = sep,

day = "17",

language = "English",

note = "PMDU-2012, XX. International Conference: Problems of Decision Making under Uncertainties ; Conference date: 17-09-2012 Through 21-09-2012",

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TY - CONF

T1 - Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

AU - Scheibelhofer, Peter

AU - Stadlober, Ernst

AU - Hayderer, Günter

AU - Leditzky, Günter

PY - 2012/9/17

Y1 - 2012/9/17

UR - http://www.pdmu.univ.kiev.ua/PDMU_2012W/Program.pdf

M3 - (Old data) Lecture or Presentation

T2 - PMDU-2012, XX. International Conference: Problems of Decision Making under Uncertainties

Y2 - 17 September 2012 through 21 September 2012

ER -

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Other files and links

Applied Statistics

Cite this

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Other files and links

Projects

Applied Statistics

Cite this