Improving efficiency, functionality and resolution capabilities of electron beam induced deposition processes

Harald Plank; Roland Schmied; Florian Kolb; Christian Gspan; Thomas Haber; Jason Fowlkes; Daryl A. Smith; Philip D. Rack; Gerald Kothleitner; Ferdinand Hofer

Improving efficiency, functionality and resolution capabilities of electron beam induced deposition processes

Harald Plank, Roland Schmied, Florian Kolb, Christian Gspan, Thomas Haber, Jason Fowlkes, Daryl A. Smith, Philip D. Rack, Gerald Kothleitner, Ferdinand Hofer

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	Physical Sciences: Tools and Techniques
Publisher	.
Pages	789-790
ISBN (Print)	978-0-9502463-6-9
Publication status	Published - 2012
Event	European Microscopy Congress - Manchester Duration: 16 Sept 2012 → 21 Sept 2012

Conference

Conference	European Microscopy Congress
City	Manchester
Period	16/09/12 → 21/09/12

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Cite this

@inproceedings{513f073e15844332b733e95b5a5540f6,

title = "Improving efficiency, functionality and resolution capabilities of electron beam induced deposition processes",

author = "Harald Plank and Roland Schmied and Florian Kolb and Christian Gspan and Thomas Haber and Jason Fowlkes and Smith, {Daryl A.} and Rack, {Philip D.} and Gerald Kothleitner and Ferdinand Hofer",

year = "2012",

language = "English",

isbn = "978-0-9502463-6-9",

pages = "789--790",

booktitle = "Physical Sciences: Tools and Techniques",

publisher = ".",

note = "European Microscopy Congress ; Conference date: 16-09-2012 Through 21-09-2012",

}

TY - GEN

T1 - Improving efficiency, functionality and resolution capabilities of electron beam induced deposition processes

AU - Plank, Harald

AU - Schmied, Roland

AU - Kolb, Florian

AU - Gspan, Christian

AU - Haber, Thomas

AU - Fowlkes, Jason

AU - Smith, Daryl A.

AU - Rack, Philip D.

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

PY - 2012

Y1 - 2012

M3 - Conference paper

SN - 978-0-9502463-6-9

SP - 789

EP - 790

BT - Physical Sciences: Tools and Techniques

PB - .

T2 - European Microscopy Congress

Y2 - 16 September 2012 through 21 September 2012

ER -