In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques

Michael Rogers, R.M. Langford

Research output: Contribution to journal › Article › peer-review

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@article{b39428fb2d5645d9a8f6064524209cd8,

title = "In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques",

author = "Michael Rogers and R.M. Langford",

year = "2008",

doi = "10.1016/j.micron.2008.02.006",

language = "English",

pages = "1325--1330",

journal = "Micron",

issn = "0968-4328",

publisher = "Elsevier Limited",

number = "39",

}