Inverted fireball deposition of carbon films with extremely low surface roughness

J. Gruenwald*, G. Eichenhofer, G. Filipič, Federl, W. Feuchtenberger, K. Panos, G. Hernández Rodríguez, A. M. Coclite

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


The surface of carbon films deposited with inverted plasma fireballs is analysed in this paper. Measurements were conducted with Raman spectroscopy, atomic force microscopy and nanoindentation. The latter was used to obtain Young’s modulus as well as Martens and Vickers hardness. The roughness of the film was measured by atomic force microscopy and its thickness was measured. It was shown with Raman spectroscopy that the films are homogeneous in terms of atomic composition and layer thickness over an area of about 125 × 125 mm. Furthermore, it was demonstrated that inverted plasma fireballs are a viable tool for obtaining homogeneous, large area carbon films with rapid growth and very little energy consumption. The obtained films show very low roughness.

Original languageEnglish
JournalCarbon Letters
Publication statusE-pub ahead of print - 2022


  • Carbon
  • Deposition
  • Inverted fireballs

ASJC Scopus subject areas

  • Ceramics and Composites
  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Process Chemistry and Technology
  • Organic Chemistry
  • Inorganic Chemistry
  • Materials Chemistry

Fields of Expertise

  • Advanced Materials Science


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