Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

Stefan Kirnstötter; Martin Mario Faccinelli; Peter Hadley; Reinhart Job; Werner Schustereder; Johannes Laven; Hans-Joachim Schulze

doi:10.1149/05005.0115ecst

Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

Stefan Kirnstötter, Martin Mario Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	145-160
Journal	ECS Transactions
Volume	50
Issue number	5
DOIs	https://doi.org/10.1149/05005.0115ecst
Publication status	Published - 2013

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Access to Document

10.1149/05005.0115ecst

Cite this

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title = "Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC",

author = "Stefan Kirnst{\"o}tter and Faccinelli, {Martin Mario} and Peter Hadley and Reinhart Job and Werner Schustereder and Johannes Laven and Hans-Joachim Schulze",

year = "2013",

doi = "10.1149/05005.0115ecst",

language = "English",

volume = "50",

pages = "145--160",

journal = "ECS Transactions",

issn = "1938-6737",

publisher = "Electrochemical Society, Inc.",

number = "5",

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T1 - Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

AU - Kirnstötter, Stefan

AU - Faccinelli, Martin Mario

AU - Hadley, Peter

AU - Job, Reinhart

AU - Schustereder, Werner

AU - Laven, Johannes

AU - Schulze, Hans-Joachim

PY - 2013

Y1 - 2013

U2 - 10.1149/05005.0115ecst

DO - 10.1149/05005.0115ecst

M3 - Article

SN - 1938-6737

VL - 50

SP - 145

EP - 160

JO - ECS Transactions

JF - ECS Transactions

IS - 5

ER -