Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

Stefan Kirnstötter, Martin Mario Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)145-160
JournalECS Transactions
Issue number5
Publication statusPublished - 2013

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

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