Lithography of porous materials for devices fabrication

Paolo Falcaro; Plinio Innocenzi; Anita J. Hill; Cara Doherty

doi:10.1117/12.904854

Lithography of porous materials for devices fabrication

Paolo Falcaro^*, Plinio Innocenzi, Anita J. Hill, Cara Doherty

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Abstract

Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8204
DOIs	https://doi.org/10.1117/12.904854
Publication status	Published - 2011
Externally published	Yes
Event	Smart Nano-Micro Materials and Devices - Hawthorn, VIC, Australia Duration: 5 Dec 2011 → 7 Dec 2011

Conference

Conference	Smart Nano-Micro Materials and Devices
Country/Territory	Australia
City	Hawthorn, VIC
Period	5/12/11 → 7/12/11

Keywords

Device
Lithography
Mesoporous
Metal organic frameworks
MOF
Patterning

ASJC Scopus subject areas

Applied Mathematics
Computer Science Applications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1117/12.904854

Cite this

@inproceedings{a2333fbe272744d89e9405a48f7f0b4c,

title = "Lithography of porous materials for devices fabrication",

abstract = "Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.",

keywords = "Device, Lithography, Mesoporous, Metal organic frameworks, MOF, Patterning",

author = "Paolo Falcaro and Plinio Innocenzi and Hill, {Anita J.} and Cara Doherty",

year = "2011",

doi = "10.1117/12.904854",

language = "English",

isbn = "9780819488459",

volume = "8204",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

note = "Smart Nano-Micro Materials and Devices ; Conference date: 05-12-2011 Through 07-12-2011",

}

TY - GEN

T1 - Lithography of porous materials for devices fabrication

AU - Falcaro, Paolo

AU - Innocenzi, Plinio

AU - Hill, Anita J.

AU - Doherty, Cara

PY - 2011

Y1 - 2011

N2 - Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.

AB - Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.

KW - Device

KW - Lithography

KW - Mesoporous

KW - Metal organic frameworks

KW - MOF

KW - Patterning

UR - http://www.scopus.com/inward/record.url?scp=84855763343&partnerID=8YFLogxK

U2 - 10.1117/12.904854

DO - 10.1117/12.904854

M3 - Conference paper

AN - SCOPUS:84855763343

SN - 9780819488459

VL - 8204

BT - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Nano-Micro Materials and Devices

Y2 - 5 December 2011 through 7 December 2011

ER -

Lithography of porous materials for devices fabrication

Abstract

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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