Original language | English |
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Title of host publication | The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication |
Chapter | 7A3 |
Number of pages | 2 |
Publication status | Published - 30 May 2017 |
ASJC Scopus subject areas
- Materials Science(all)
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Application