MEMS-based fine tuning of high Q-factor E-plane filters

Fabrizio Gentili, Valeria Nocella*, Luca Pelliccia, Fabrizio Cacciamani, Paola Farinelli, Roberto Sorrentino

*Corresponding author for this work

Research output: Contribution to journalConference article


This paper presents a new concept for the fine tuning of high-Q bandpass filters to compensate for small response deviations due to manufacturing tolerances and temperature variations. Discrete frequency tuning steps are obtained using a rectangular waveguide resonator loaded with a reconfigurable E-plane circuit. Ohmic micro electromechanical systems (MEMS) switches can be placed along thin E-plane metal strips so as to modify the E-field distribution of the TE101 resonant mode, thus the central frequency of the filter. As an example, 0.1% frequency steps can easily be obtained in a 10 GHz resonant cavity. The use of low-loss substrates ensures high-quality factors of the order of 1000. The feasibility of the proposed approach is demonstrated both by full-wave simulations and by fabricating and measuring an X-band hardwired prototype.
Original languageEnglish
Pages (from-to)467-472
JournalInternational Journal of Microwave and Wireless Technologies
Issue number5
Publication statusPublished - 2014
Externally publishedYes
Event14th International Symposium on RF-MEMS and RF-Microsystems: MEMSWAVE 2013 - Potsdam, Germany
Duration: 1 Jul 20133 Jul 2013

Fields of Expertise

  • Information, Communication & Computing

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