Microfabrication of the combined AFM-SECM Sensors utilizing Focused Ion Beam and Isotropic Inductively Coupled Plasma-Reactive Ion Etching

Amra Avdic, Alois Lugstein, Ming Wu, Bernhard Gollas, Ilya Pobelov, Thomas Wandlowski, Emmerich Bertagnolli

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 29 Nov 2010
EventMRS Fall Meeting 2010 - Boston, United States
Duration: 29 Nov 20102 Dec 2010


ConferenceMRS Fall Meeting 2010
Country/TerritoryUnited States

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

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