Microscale investigation of surface contaminations during silicon epitaxial growth"

Brigitte Patsch, T. Ehmann, R. Kirchner, G. Puppe, Ernst Lankmayr

Research output: Contribution to journal › Article › peer-review

Treatment code (Nähere Zuordnung)

@article{d9876e1a9b09485582ddafadb9f83248,

title = "Microscale investigation of surface contaminations during silicon epitaxial growth{"}",

author = "Brigitte Patsch and T. Ehmann and R. Kirchner and G. Puppe and Ernst Lankmayr",

year = "2008",

doi = "10.1007/S00604-008-0080-8",

language = "English",

pages = "0--0",

journal = "Microchimica Acta",

issn = "1436-5073",

publisher = "Springer",

}