Multiple proton implantations into silicon: A combined EBIC and SRP study

Stefan Kirnstötter; Martin Faccinelli; Moriz Jelinek; Werner Schustereder; Johannes Laven; Hans-Joachim Schulze; Peter Hadley

doi:10.4028/www.scientific.net/SSP.205-206.311

Multiple proton implantations into silicon: A combined EBIC and SRP study

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze, Peter Hadley

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	311-316
Journal	Solid State Phenomena
Volume	205-206
DOIs	https://doi.org/10.4028/www.scientific.net/SSP.205-206.311
Publication status	Published - 2014

Fields of Expertise

Advanced Materials Science

Access to Document

10.4028/www.scientific.net/SSP.205-206.311

Cite this

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title = "Multiple proton implantations into silicon: A combined EBIC and SRP study",

author = "Stefan Kirnst{\"o}tter and Martin Faccinelli and Moriz Jelinek and Werner Schustereder and Johannes Laven and Hans-Joachim Schulze and Peter Hadley",

year = "2014",

doi = "10.4028/www.scientific.net/SSP.205-206.311",

language = "English",

volume = "205-206",

pages = "311--316",

journal = "Solid State Phenomena",

issn = "1012-0394",

publisher = "Trans Tech Publications Ltd.",

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T1 - Multiple proton implantations into silicon: A combined EBIC and SRP study

AU - Kirnstötter, Stefan

AU - Faccinelli, Martin

AU - Jelinek, Moriz

AU - Schustereder, Werner

AU - Laven, Johannes

AU - Schulze, Hans-Joachim

AU - Hadley, Peter

PY - 2014

Y1 - 2014

U2 - 10.4028/www.scientific.net/SSP.205-206.311

DO - 10.4028/www.scientific.net/SSP.205-206.311

M3 - Article

SN - 1012-0394

VL - 205-206

SP - 311

EP - 316

JO - Solid State Phenomena

JF - Solid State Phenomena

ER -