Nitridation of Niobium Pentoxide Films in Ammonia by Rapid Thermal Processing

Volha Matylitskaya, Gerald Kothleitner, Wolfgang Bock, B.O. Kolbesen

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1585-1593
JournalZeitschrift für Anorganische und Allgemeine Chemie
Publication statusPublished - 2009

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

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