Nitridation of Niobium Pentoxide Films in Ammonia by Rapid Thermal Processing

Volha Matylitskaya, Gerald Kothleitner, Wolfgang Bock, B.O. Kolbesen

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1585-1593
Journal	Zeitschrift für Anorganische und Allgemeine Chemie
DOIs	https://doi.org/10.1002/zaac.200801355
Publication status	Published - 2009

ASJC Scopus subject areas

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title = "Nitridation of Niobium Pentoxide Films in Ammonia by Rapid Thermal Processing",

author = "Volha Matylitskaya and Gerald Kothleitner and Wolfgang Bock and B.O. Kolbesen",

year = "2009",

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T1 - Nitridation of Niobium Pentoxide Films in Ammonia by Rapid Thermal Processing

AU - Matylitskaya, Volha

AU - Kothleitner, Gerald

AU - Bock, Wolfgang

AU - Kolbesen, B.O.

PY - 2009

Y1 - 2009

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DO - 10.1002/zaac.200801355

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JO - Zeitschrift für Anorganische und Allgemeine Chemie

JF - Zeitschrift für Anorganische und Allgemeine Chemie

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