Observer-based temperature control of an LED heated silicon wafer

Martin Kleindienst, Markus Reichhartinger, Martin Horn, Felix Staudegger

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@article{37c3bd40f7fe4a65b2a59afa08865615,

title = "Observer-based temperature control of an LED heated silicon wafer",

author = "Martin Kleindienst and Markus Reichhartinger and Martin Horn and Felix Staudegger",

year = "2018",

doi = "10.1016/j.jprocont.2018.07.006",

language = "English",

volume = "70",

pages = "96--108",

journal = "Journal of Process Control",

issn = "0959-1524",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Observer-based temperature control of an LED heated silicon wafer

AU - Kleindienst, Martin

AU - Reichhartinger, Markus

AU - Horn, Martin

AU - Staudegger, Felix

PY - 2018

Y1 - 2018

U2 - 10.1016/j.jprocont.2018.07.006

DO - 10.1016/j.jprocont.2018.07.006

M3 - Article

SN - 0959-1524

VL - 70

SP - 96

EP - 108

JO - Journal of Process Control

JF - Journal of Process Control

ER -