On the Route towards Precision - 3D-Nanoprinting

Anna Weitzer, Michael Huth, Harald Plank

Research output: Contribution to conferenceAbstract


Among the few additive-manufacturing techniques capable of creating 3-dimensional objects on the nanoscale, 3Dnanoprinting via Focused Electron Beam Induced Deposition (3D-FEBID) is an increasingly relevant technology forbuilding high-fidelity nanostructures. Its capabilities of depositing feature sizes below 20 nm under optimized conditionsand below 100 nm on a regular basis and its flexibility both in terms of substrate as well as precursor materialsmake it a unique technology with many possibilities and yet unexplored applications. While it has been used anddeveloped further for a few years now, most fabricated structures in the past have been meshed [1], meaning acombination of differently oriented, individual nanowires, connected at specific points in 3D space according to thetarget application. This work leverages 3D-FEBID to the next level by expanding its capabilities from mesh-like towardclosed (sheet-like) structures with a high degree of precision. The main challenge and source of most deviations fromtarget shapes is thereby based on local beam heating and its implications on local growth rates. While well understoodin meshed structures, closed objects revealed additional dependencies on the dimensions of built objects andthe XY pixel position within the structures. Furthermore, electron trajectories are more complex in closed objects,introducing additional proximity effects. To address these problems, we combined finite-difference simulations with3D-FEBID experiments and developed a Python-based compensation tool, capable of stabilizing the growth for eachXY pixel point in individual patterning planes by pre-determined parameter adjustments (Fig. 1a). The gained insightallowed further expansion, now being applicable for different element-widths and -heights, as demonstrated by moreadvanced structures (Fig. 1b). By that, we crucially expanded FEBID-based 3D nanoprinting by opening up designpossibilities for closed and consequently mixed objects for novel applications in various fields of research and development.
Original languageEnglish
Publication statusPublished - 2022
Event8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing: FEBIP 2022 - Krakow, Krakow, Poland
Duration: 12 Jul 202215 Jul 2022


Conference8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing
Abbreviated titleFEBIP 2022
Internet address

ASJC Scopus subject areas

  • General Materials Science

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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