Optische Anordnung für Ellpisometrie

Eduard Gilli (Inventor), Robert Schennach (Inventor), Martin Kornschober (Inventor)

Institute of Solid State Physics (5130)

Research output: Patent

Original language	German
Patent number	WO 2011/022745
Publication status	Published - 3 Mar 2011

Fields of Expertise

Advanced Materials Science

Other files and links

http://www.wipo.int/patentscope/search/en/docservicepdf_pct/id00000013170488?download

Optische Anordnung für Ellipso - Optical unit for spectroscopic ellipsometry
Schennach, R., Kornschober, M. & Gilli, E.
1/10/09 → 31/03/11
Project: Research project
CD-Laboratory for Surface Chemical and Physical Fundamentals Of Paper Strength
Hirn, U., Bauer, W., Suppan, L., Miletzky, F. A., Diebald, S., Fischer, W. J., Gilli, E., Schennach, E., Lahti, J. A., Weber, F. & Schennach, R.
1/03/07 → 31/10/14
Project: Research project

Cite this