Oxidation and diffusion processes during annealing of AlCrVN hard coatings

R. Franz; J. Neidhardt; C. Mitterer; Bernhard Schaffer; H. Hutter; R. Kaindl; B. Satory; R. Tessadri; M. Lechthaler; P. Polcik

doi:DOI: 10.1116/1.2841508

Oxidation and diffusion processes during annealing of AlCrVN hard coatings

R. Franz, J. Neidhardt, C. Mitterer, Bernhard Schaffer, H. Hutter, R. Kaindl, B. Satory, R. Tessadri, M. Lechthaler, P. Polcik

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	302-308
Journal	Journal of Vacuum Science and Technology / A
DOIs	https://doi.org/DOI: 10.1116/1.2841508
Publication status	Published - 2008

Treatment code (Nähere Zuordnung)

Experimental

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DOI: 10.1116/1.2841508

Cite this

@article{684ee080b5b44854bde91856ab288f97,

title = "Oxidation and diffusion processes during annealing of AlCrVN hard coatings",

author = "R. Franz and J. Neidhardt and C. Mitterer and Bernhard Schaffer and H. Hutter and R. Kaindl and B. Satory and R. Tessadri and M. Lechthaler and P. Polcik",

year = "2008",

doi = "DOI: 10.1116/1.2841508",

language = "English",

pages = "302--308",

journal = "Journal of Vacuum Science and Technology / A",

issn = "0734-2101",

publisher = "American Vacuum Society (AVS)",

}

TY - JOUR

T1 - Oxidation and diffusion processes during annealing of AlCrVN hard coatings

AU - Franz, R.

AU - Neidhardt, J.

AU - Mitterer, C.

AU - Schaffer, Bernhard

AU - Hutter, H.

AU - Kaindl, R.

AU - Satory, B.

AU - Tessadri, R.

AU - Lechthaler, M.

AU - Polcik, P.

PY - 2008

Y1 - 2008

U2 - DOI: 10.1116/1.2841508

DO - DOI: 10.1116/1.2841508

M3 - Article

SP - 302

EP - 308

JO - Journal of Vacuum Science and Technology / A

JF - Journal of Vacuum Science and Technology / A

SN - 0734-2101

ER -