Oxidation and diffusion processes during annealing of AlCrVN hard coatings

R. Franz, J. Neidhardt, C. Mitterer, Bernhard Schaffer, H. Hutter, R. Kaindl, B. Satory, R. Tessadri, M. Lechthaler, P. Polcik

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)302-308
JournalJournal of Vacuum Science and Technology / A
Publication statusPublished - 2008

Treatment code (Nähere Zuordnung)

  • Experimental

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