PARTICLE DENSITY SENSOR USING EVANESCENT WAVE OF WAVEGUIDE

Jochen Kraft; Georg Röhrer; Fernando Castano; Anderson Singulani; Paul Maierhofer

PARTICLE DENSITY SENSOR USING EVANESCENT WAVE OF WAVEGUIDE

Jochen Kraft (Inventor), Georg Röhrer (Inventor), Fernando Castano (Inventor), Anderson Singulani (Inventor), Paul Maierhofer (Inventor)

Research output: Patent

Abstract

The particle sensor device comprises a substrate (1), a photodetector (3), a dielectric (4) on or above the substrate (1), a source of electromagnetic radiation (5), and a through-substrate via (6) in the substrate (1). The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide (7) is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion (7.1) of the waveguide. A further portion (7.2) of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.

Translated title of the contribution	PARTIKELDICHTE-SENSOR UNTER VERWENDUNG DER EVANESZENZ EINES WELLENLEITERS
Original language	English
Patent number	EP3499215
IPC	G01N 15/ 00 A N
Priority date	15/12/17
Publication status	Published - 19 Jun 2019

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title = "PARTICLE DENSITY SENSOR USING EVANESCENT WAVE OF WAVEGUIDE",

abstract = "The particle sensor device comprises a substrate (1), a photodetector (3), a dielectric (4) on or above the substrate (1), a source of electromagnetic radiation (5), and a through-substrate via (6) in the substrate (1). The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide (7) is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion (7.1) of the waveguide. A further portion (7.2) of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.",

author = "Jochen Kraft and Georg R{\"o}hrer and Fernando Castano and Anderson Singulani and Paul Maierhofer",

year = "2019",

month = jun,

day = "19",

language = "English",

type = "Patent",

note = "EP3499215; G01N 15/ 00 A N",

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TY - PAT

T1 - PARTICLE DENSITY SENSOR USING EVANESCENT WAVE OF WAVEGUIDE

AU - Kraft, Jochen

AU - Röhrer, Georg

AU - Castano, Fernando

AU - Singulani, Anderson

AU - Maierhofer, Paul

PY - 2019/6/19

Y1 - 2019/6/19

N2 - The particle sensor device comprises a substrate (1), a photodetector (3), a dielectric (4) on or above the substrate (1), a source of electromagnetic radiation (5), and a through-substrate via (6) in the substrate (1). The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide (7) is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion (7.1) of the waveguide. A further portion (7.2) of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.

AB - The particle sensor device comprises a substrate (1), a photodetector (3), a dielectric (4) on or above the substrate (1), a source of electromagnetic radiation (5), and a through-substrate via (6) in the substrate (1). The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide (7) is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion (7.1) of the waveguide. A further portion (7.2) of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.

M3 - Patent

M1 - EP3499215

ER -

PARTICLE DENSITY SENSOR USING EVANESCENT WAVE OF WAVEGUIDE

Abstract

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