Plasma deposited organosilicon multistacks for high-performance low-carbon steel protection

Anna Maria Coclite, Antonella Milella, Fabio Palumbo*, Christophe Le Pen, Riccardo D'Agostino

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


The alternated deposition of silicon oxide and organosilicon layers, yielding to ultra-barrier films against the transmission of vapors and gases through plastic substrates, has been demonstrated to be also an effective tool for the deposition of highly corrosion protective coatings on low-carbon steel substrate. PECVD is really efficient for the deposition of multilayered stacks since it allows the deposition of the organosilicon and silicon oxide layers in the same process chamber and using the same precursor, the tetraethoxysilane. The multilayer approach leads to 600-nm-thick coatings with high corrosion resistance (1.1×107ω2), while a layer of SiOx has the same protective effectiveness only for thickness greater than 1μm. The use of modulated discharges for the multilayer deposition exhibits an improved resistance to corrosion by two orders of magnitude with respect to continuous mode. Multilayer architectures, made of alternated organosilicon and silicon oxide layers, were tested for the deposition of corrosion resistant coatings on metal substrates. Such coatings reached the same protective effectiveness of a single silicon oxide layer but with halved thickness. Multilayer deposited through modulated discharge showed a further two-orders-of-magnitude-improvement. FT-IR of the gas phase was correlated to the FT-IR film characterization.

Original languageEnglish
Pages (from-to)802-812
Number of pages11
JournalPlasma Processes and Polymers
Issue number9-10
Publication statusPublished - 14 Oct 2010
Externally publishedYes


  • corrosion resistance
  • FT-IR investigation
  • modulated discharge
  • multilayers
  • polymer

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Polymers and Plastics


Dive into the research topics of 'Plasma deposited organosilicon multistacks for high-performance low-carbon steel protection'. Together they form a unique fingerprint.

Cite this