| Original language | English |
|---|---|
| Patent number | WO 2004/073009 A2 |
| Publication status | Published - 26 Aug 2004 |
Plasma Prozessing Installation
Peter Ziger (Inventor), Helmut Jäger (Inventor), Christian Neureiter (Inventor)
Research output: Patent
Peter Ziger (Inventor), Helmut Jäger (Inventor), Christian Neureiter (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | WO 2004/073009 A2 |
| Publication status | Published - 26 Aug 2004 |