| Original language | English |
|---|---|
| Pages (from-to) | 501-504 |
| Journal | Advanced Materials |
| Volume | 4 |
| Publication status | Published - 1992 |
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)
- Experimental
Preparation of mixtures of Silicon oxynitride and silicon nitride
Ferdinand Hofer, Edwin Hengge
Research output: Contribution to journal › Article › peer-review