Radiation assisted material synthesis and processingby deep X-ray lithography

Benedetta Marmiroli; Paolo Falcaro; Luca Malfatti; Sang Hoon Han; Alessandra Pinna; Ludovic F Dumee; Plinio Innocenzi; Heinz Amenitsch

Radiation assisted material synthesis and processingby deep X-ray lithography

Benedetta Marmiroli, Paolo Falcaro, Luca Malfatti, Sang Hoon Han, Alessandra Pinna, Ludovic F Dumee, Plinio Innocenzi, Heinz Amenitsch

Institute of Inorganic Chemistry (6330)

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 3 Sept 2013
Event	63. Jahrestagung der österreichischen physikalischen Gesellschaft: ÖPG 2013 - Linz, Austria Duration: 3 Sept 2013 → 6 Sept 2013

Conference

Conference	63. Jahrestagung der österreichischen physikalischen Gesellschaft
Country/Territory	Austria
City	Linz
Period	3/09/13 → 6/09/13

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Experimental
Review

Cite this

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title = "Radiation assisted material synthesis and processingby deep X-ray lithography",

author = "Benedetta Marmiroli and Paolo Falcaro and Luca Malfatti and Han, {Sang Hoon} and Alessandra Pinna and Dumee, {Ludovic F} and Plinio Innocenzi and Heinz Amenitsch",

year = "2013",

month = sep,

day = "3",

language = "English",

note = "63. Jahrestagung der {\"o}sterreichischen physikalischen Gesellschaft : {\"O}PG 2013 ; Conference date: 03-09-2013 Through 06-09-2013",

}

TY - CONF

T1 - Radiation assisted material synthesis and processingby deep X-ray lithography

AU - Marmiroli, Benedetta

AU - Falcaro, Paolo

AU - Malfatti, Luca

AU - Han, Sang Hoon

AU - Pinna, Alessandra

AU - Dumee, Ludovic F

AU - Innocenzi, Plinio

AU - Amenitsch, Heinz

PY - 2013/9/3

Y1 - 2013/9/3

M3 - (Old data) Lecture or Presentation

T2 - 63. Jahrestagung der österreichischen physikalischen Gesellschaft

Y2 - 3 September 2013 through 6 September 2013

ER -