Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H2O Reactions

Barbara Geier, Christian Gspan, Jason D. Fowlkes, Harald Matthias Fitzek, Sebastian Rauch, Johannes Rattenberger, Philip D. Rack, Harald Plank, Robert Winkler

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)14009-14016
JournalThe Journal of Physical Chemistry
Issue number25
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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