Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H2O Reactions

Barbara Geier, Christian Gspan, Jason D. Fowlkes, Harald Matthias Fitzek, Sebastian Rauch, Johannes Rattenberger, Robert Winkler, Philip D. Rack, Harald Plank*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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