Robust multivariate process control of multiway data in semiconductor fabrication

Peter Scheibelhofer, Günter Hayderer, Ernst Stadlober

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 22 Sept 2014
EventENBIS-14 - Linz, Austria
Duration: 22 Sept 201425 Sept 2014

Conference

ConferenceENBIS-14
Abbreviated titleENBIS 14
Country/TerritoryAustria
CityLinz
Period22/09/1425/09/14

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application
  • Applied Statistics

    Stadlober, E.

    1/01/95 → …

    Project: Research area

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