@article{c85c89a20fa040d8a4e2427695bd7297,
title = "Simulation of the proton implantation process in silicon",
keywords = " proton implantation, defect complexes, process simulation, diffusion-reaction-dissociation",
author = "Martin Faccinelli and Moriz Jelinek and Thomas Wuebben and Laven, {Johannes G.} and Hans-Joachim Schulze and Peter Hadley",
year = "2016",
month = jul,
day = "19",
doi = "10.1002/pssc.201600038",
language = "English",
journal = "Physica Status Solidi (C) - Current Topics in Solid State Physics",
issn = "1610-1642",
publisher = "Wiley-VCH ",
}