SIMULATIONS OF LIQUID FILM FLOWS WITH FREE SURFACE ON ROTATING SILICON WAFERS (ROWAFLOWSIM)

Markus Junk; Frank Holsteyns; Felix Staudegger; Christiane Lechner; Hendrik Kuhlmann; Doris Prieling; Helfried Steiner; Bernd Gschaider; Petr Vita

SIMULATIONS OF LIQUID FILM FLOWS WITH FREE SURFACE ON ROTATING SILICON WAFERS (ROWAFLOWSIM)

Markus Junk, Frank Holsteyns, Felix Staudegger, Christiane Lechner, Hendrik Kuhlmann, Doris Prieling, Helfried Steiner, Bernd Gschaider, Petr Vita

Institute of Fluid Mechanics and Heat Transfer (3210)

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	Proceedings of the 10th International Conference on Modeling and Applied Simulation
Publisher	.
Pages	---
Publication status	Published - 2011
Event	The 10th International Conference on Modeling and Applied Simulation (MAS 2011) - Rom, Italy Duration: 12 Sept 2011 → 14 Sept 2011

Conference

Conference	The 10th International Conference on Modeling and Applied Simulation (MAS 2011)
Country/Territory	Italy
City	Rom
Period	12/09/11 → 14/09/11

Fields of Expertise

Information, Communication & Computing

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

RoWaFlowSim - Simulations of liquid film flows with free surface on rotating silicon wafers
Prieling, D., Steiner, H. & Brenn, G.
1/04/09 → 31/03/12
Project: Research project

Cite this

Junk, M, Holsteyns, F, Staudegger, F, Lechner, C, Kuhlmann, H, Prieling, D, Steiner, H, Gschaider, B & Vita, P 2011, SIMULATIONS OF LIQUID FILM FLOWS WITH FREE SURFACE ON ROTATING SILICON WAFERS (ROWAFLOWSIM). in Proceedings of the 10th International Conference on Modeling and Applied Simulation. ., pp. ---, The 10th International Conference on Modeling and Applied Simulation (MAS 2011), Rom, Italy, 12/09/11.

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title = "SIMULATIONS OF LIQUID FILM FLOWS WITH FREE SURFACE ON ROTATING SILICON WAFERS (ROWAFLOWSIM)",

author = "Markus Junk and Frank Holsteyns and Felix Staudegger and Christiane Lechner and Hendrik Kuhlmann and Doris Prieling and Helfried Steiner and Bernd Gschaider and Petr Vita",

year = "2011",

language = "English",

pages = "------",

booktitle = "Proceedings of the 10th International Conference on Modeling and Applied Simulation",

publisher = ".",

note = "The 10th International Conference on Modeling and Applied Simulation (MAS 2011) ; Conference date: 12-09-2011 Through 14-09-2011",

}

TY - GEN

T1 - SIMULATIONS OF LIQUID FILM FLOWS WITH FREE SURFACE ON ROTATING SILICON WAFERS (ROWAFLOWSIM)

AU - Junk, Markus

AU - Holsteyns, Frank

AU - Staudegger, Felix

AU - Lechner, Christiane

AU - Kuhlmann, Hendrik

AU - Prieling, Doris

AU - Steiner, Helfried

AU - Gschaider, Bernd

AU - Vita, Petr

PY - 2011

Y1 - 2011

M3 - Conference paper

SP - ---

BT - Proceedings of the 10th International Conference on Modeling and Applied Simulation

PB - .

T2 - The 10th International Conference on Modeling and Applied Simulation (MAS 2011)

Y2 - 12 September 2011 through 14 September 2011

ER -

SIMULATIONS OF LIQUID FILM FLOWS WITH FREE SURFACE ON ROTATING SILICON WAFERS (ROWAFLOWSIM)

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Projects

RoWaFlowSim - Simulations of liquid film flows with free surface on rotating silicon wafers

Cite this