Abstract
One of the main challenges currently encountered in focused electron (FEBID) and ion beam induced deposition(FIBID) is the availability of suitable precursor molecules for desired material compositions [1]. Besides the depositionof single metal deposits, the deposition of binary materials with defined stoichiometry is very challenging. Anattractive approach to simplify the challenging task for metal silicides is the use of heterometallic precursors whichalready possess the desired constituent stoichiometry. This contribution compares two precursors for theFEBID/FIBID deposition of CoSix-based materials of predefined composition, H3SiCo(CO)4 and H2Si(Co(CO)4)2.
| Original language | English |
|---|---|
| Publication status | Published - 2022 |
| Event | 8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing: FEBIP 2022 - Krakow, Krakow, Poland Duration: 12 Jul 2022 → 15 Jul 2022 https://acmin.agh.edu.pl/en/febip2022/ |
Conference
| Conference | 8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing |
|---|---|
| Abbreviated title | FEBIP 2022 |
| Country/Territory | Poland |
| City | Krakow |
| Period | 12/07/22 → 15/07/22 |
| Internet address |
ASJC Scopus subject areas
- General Materials Science
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)