Single Source Precursors in FEBID and FIBID: Similarities and Differences for CoSix Deposition

F. Jungwirth, F. Porrati, Daniel Knez, Harald Plank, Michael Huth, Sven Barth

Research output: Contribution to conferencePoster


One of the main challenges currently encountered in focused electron (FEBID) and ion beam induced deposition(FIBID) is the availability of suitable precursor molecules for desired material compositions [1]. Besides the depositionof single metal deposits, the deposition of binary materials with defined stoichiometry is very challenging. Anattractive approach to simplify the challenging task for metal silicides is the use of heterometallic precursors whichalready possess the desired constituent stoichiometry. This contribution compares two precursors for theFEBID/FIBID deposition of CoSix-based materials of predefined composition, H3SiCo(CO)4 and H2Si(Co(CO)4)2.
Original languageEnglish
Publication statusPublished - 2022
Event8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing: FEBIP 2022 - Krakow, Krakow, Poland
Duration: 12 Jul 202215 Jul 2022


Conference8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing
Abbreviated titleFEBIP 2022
Internet address

ASJC Scopus subject areas

  • General Materials Science

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this