| Original language | English |
|---|---|
| Pages (from-to) | 481-485 |
| Journal | Vacuum |
| Volume | 43 |
| Publication status | Published - 1992 |
Treatment code (Nähere Zuordnung)
- Application
- Experimental
Surface analysis of dielectric films by time of flight SIMS
Research output: Contribution to journal › Article › peer-review