The influence of beam defocus on volume growth rates for electron beam induced platinum deposition

Harald Plank; Christian Gspan; Martina Dienstleder; Gerald Kothleitner; Ferdinand Hofer

doi:10.1088/0957-4484/19/48/485302

The influence of beam defocus on volume growth rates for electron beam induced platinum deposition

Harald Plank, Christian Gspan, Martina Dienstleder, Gerald Kothleitner, Ferdinand Hofer

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	485302-485311
Journal	Nanotechnology
Volume	19
Issue number	48
DOIs	https://doi.org/10.1088/0957-4484/19/48/485302
Publication status	Published - 2008

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Basic - Fundamental (Grundlagenforschung)

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10.1088/0957-4484/19/48/485302

Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → …
Project: Research project

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title = "The influence of beam defocus on volume growth rates for electron beam induced platinum deposition",

author = "Harald Plank and Christian Gspan and Martina Dienstleder and Gerald Kothleitner and Ferdinand Hofer",

year = "2008",

doi = "10.1088/0957-4484/19/48/485302",

language = "English",

volume = "19",

pages = "485302--485311",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing Ltd.",

number = "48",

}

TY - JOUR

T1 - The influence of beam defocus on volume growth rates for electron beam induced platinum deposition

AU - Plank, Harald

AU - Gspan, Christian

AU - Dienstleder, Martina

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

PY - 2008

Y1 - 2008

U2 - 10.1088/0957-4484/19/48/485302

DO - 10.1088/0957-4484/19/48/485302

M3 - Article

SN - 0957-4484

VL - 19

SP - 485302

EP - 485311

JO - Nanotechnology

JF - Nanotechnology

IS - 48

ER -

The influence of beam defocus on volume growth rates for electron beam induced platinum deposition

Treatment code (Nähere Zuordnung)

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Projects

Functional Nanofabrication

Cite this