Abstract
Silicon-based microelectronics forms a major foundation of our modern society. Small lithium-ion
batteries act as the key enablers of its success and have revolutionised portable electronics used in
our all everyday’s life. While large-scale LIBs are expected to help establish electric vehicles, on the
other end of device size chip-integrated Si-based μ-batteries may revolutionise microelectronics once
more. In general, Si is regarded as one of the white hopes since it offers energy densities being ten
times higher than conventional anode materials. The use of monocrystalline, wafer-grade Si, however,
requires several hurdles to be overcome since it its volume largely expands during lithiation. Here, we
will show how 3D patterned Si wafers, prepared by the sophisticated techniques from semiconductor
industry, are to be electrochemically activated to overcome these limitations and to leverage their full
potential being reflected in stable charge capacities (>1000mAhg–1) and high Coulomb efficiencies
(98.8%).
Original language | English |
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Article number | 31712 |
Number of pages | 8 |
Journal | Scientific Reports |
Volume | 6 |
DOIs | |
Publication status | Published - 17 Aug 2016 |