The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition

Robert Winkler; Jason D. Fowlkes; Aleksandra Szkudlarek; Ivo Utke; Philip D. Rack; Harald Plank

doi:10.1021/am405591d. ISSN: 1944-8244.

The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition

Robert Winkler, Jason D. Fowlkes, Aleksandra Szkudlarek, Ivo Utke, Philip D. Rack, Harald Plank

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	German
Pages (from-to)	2987-2995
Journal	ACS Applied Materials & Interfaces
Volume	6
DOIs	https://doi.org/10.1021/am405591d. ISSN: 1944-8244.
Publication status	Published - 2014

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Access to Document

10.1021/am405591d. ISSN: 1944-8244.

Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → …
Project: Research project

Cite this

@article{969f754c7e04438c94014575d4ce58f9,

title = "The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition",

author = "Robert Winkler and Fowlkes, {Jason D.} and Aleksandra Szkudlarek and Ivo Utke and Rack, {Philip D.} and Harald Plank",

year = "2014",

doi = "10.1021/am405591d. ISSN: 1944-8244.",

language = "deutsch",

volume = "6",

pages = "2987--2995",

journal = "ACS Applied Materials & Interfaces",

issn = "1944-8252 ",

publisher = "American Chemical Society",

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TY - JOUR

T1 - The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition

AU - Winkler, Robert

AU - Fowlkes, Jason D.

AU - Szkudlarek, Aleksandra

AU - Utke, Ivo

AU - Rack, Philip D.

AU - Plank, Harald

PY - 2014

Y1 - 2014

U2 - 10.1021/am405591d. ISSN: 1944-8244.

DO - 10.1021/am405591d. ISSN: 1944-8244.

M3 - Artikel

SN - 1944-8252

VL - 6

SP - 2987

EP - 2995

JO - ACS Applied Materials & Interfaces

JF - ACS Applied Materials & Interfaces

ER -

The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Projects

Functional Nanofabrication

Cite this