@inproceedings{d3e0dc5cf103493e816be0761054e359,
title = "Three-Dimensional Focused Electron Beam Induced Deposition: Design, Simulation and Experiments",
author = "Fowlkes, {Jason D.} and Lewis, {Brett B.} and E. Mutunga and P. Rack and Michael Stanford and Harald Plank and Robert Winkler",
year = "2017",
month = may,
day = "30",
language = "English",
booktitle = "The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication",
note = "The 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017, EIPBN 2017 ; Conference date: 30-05-2017 Through 02-06-2017",
}