Towards pure and compact FEBID deposits via e-beam assisted H2O purification at room temperature

Barbara Geier, Christian Gspan, J.D. Fowlkes, P.D. Rack, Harald Plank

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 2014
Event18th IMC 2014 Prag - Prag, Czech Republic
Duration: 7 Sept 201412 Sept 2014


Conference18th IMC 2014 Prag
Country/TerritoryCzech Republic

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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