Treat your Beam Induced Deposits well: Post-Processing Possibilities to Modify Material Properties

Robert Winkler; Jürgen Sattelkow; David Kuhness; D. Loibner; Verena Reisecker; Anna Weitzer; Harald Plank

Treat your Beam Induced Deposits well: Post-Processing Possibilities to Modify Material Properties

Robert Winkler, Jürgen Sattelkow, David Kuhness, D. Loibner, Verena Reisecker, Anna Weitzer, Harald Plank

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Abstract

Additive, direct-write manufacturing of micro- and nanoscale structures has
experienced a massive boost in recent years. Among the few techniques, which
enable the controlled fabrication of 3D architectures at the nanoscale, Focused
Electron/Ion Beam Induced Deposition (FEBID/FIBID) have demonstrated unique
advantages due to their design flexibility, predictability and reliability [1]. However,
material aspects are still subject of intense research, since most FEBIP/FIBID
materials notoriously suffer from high carbon contents of up to 90 at.% after initial
fabrication. This sometimes reduces or even entirely masks the intended
functionalities[2], making them less attractive for specific applications.

Original language	English
Title of host publication	EUFN 2023
Pages	23-24
Number of pages	2
Publication status	Published - 2023
Event	6th European FIB Network Workshop 2023: EUFN 2023 - EHT Zürich, Zürich, Switzerland Duration: 7 Jun 2023 → 9 Jun 2023 http://www.eu-f-n.org/2023-2/

Workshop

Workshop	6th European FIB Network Workshop 2023
Abbreviated title	EUFN 2023
Country/Territory	Switzerland
City	Zürich
Period	7/06/23 → 9/06/23
Internet address	http://www.eu-f-n.org/2023-2/

ASJC Scopus subject areas

General Materials Science

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Access to Document

http://www.eu-f-n.org/cms/wp-content/uploads/2023/05/allcontributedtalkseufn2023.pdfLicence: Unspecified

Cite this

Winkler, R, Sattelkow, J, Kuhness, D, Loibner, D, Reisecker, V, Weitzer, A & Plank, H 2023, Treat your Beam Induced Deposits well: Post-Processing Possibilities to Modify Material Properties. in EUFN 2023. pp. 23-24, 6th European FIB Network Workshop 2023, Zürich, Switzerland, 7/06/23. <http://www.eu-f-n.org/cms/wp-content/uploads/2023/05/allcontributedtalkseufn2023.pdf>

@inproceedings{8e44acba05814983967e2f284aef19ec,

title = "Treat your Beam Induced Deposits well: Post-Processing Possibilities to Modify Material Properties",

abstract = "Additive, direct-write manufacturing of micro- and nanoscale structures hasexperienced a massive boost in recent years. Among the few techniques, whichenable the controlled fabrication of 3D architectures at the nanoscale, FocusedElectron/Ion Beam Induced Deposition (FEBID/FIBID) have demonstrated uniqueadvantages due to their design flexibility, predictability and reliability [1]. However,material aspects are still subject of intense research, since most FEBIP/FIBIDmaterials notoriously suffer from high carbon contents of up to 90 at.% after initialfabrication. This sometimes reduces or even entirely masks the intendedfunctionalities[2], making them less attractive for specific applications.",

author = "Robert Winkler and J{\"u}rgen Sattelkow and David Kuhness and D. Loibner and Verena Reisecker and Anna Weitzer and Harald Plank",

year = "2023",

language = "English",

pages = "23--24",

booktitle = "EUFN 2023",

note = "6th European FIB Network Workshop 2023 : EUFN 2023, EUFN 2023 ; Conference date: 07-06-2023 Through 09-06-2023",

url = "http://www.eu-f-n.org/2023-2/",

}

TY - GEN

T1 - Treat your Beam Induced Deposits well: Post-Processing Possibilities to Modify Material Properties

AU - Winkler, Robert

AU - Sattelkow, Jürgen

AU - Kuhness, David

AU - Loibner, D.

AU - Reisecker, Verena

AU - Weitzer, Anna

AU - Plank, Harald

PY - 2023

Y1 - 2023

N2 - Additive, direct-write manufacturing of micro- and nanoscale structures hasexperienced a massive boost in recent years. Among the few techniques, whichenable the controlled fabrication of 3D architectures at the nanoscale, FocusedElectron/Ion Beam Induced Deposition (FEBID/FIBID) have demonstrated uniqueadvantages due to their design flexibility, predictability and reliability [1]. However,material aspects are still subject of intense research, since most FEBIP/FIBIDmaterials notoriously suffer from high carbon contents of up to 90 at.% after initialfabrication. This sometimes reduces or even entirely masks the intendedfunctionalities[2], making them less attractive for specific applications.

AB - Additive, direct-write manufacturing of micro- and nanoscale structures hasexperienced a massive boost in recent years. Among the few techniques, whichenable the controlled fabrication of 3D architectures at the nanoscale, FocusedElectron/Ion Beam Induced Deposition (FEBID/FIBID) have demonstrated uniqueadvantages due to their design flexibility, predictability and reliability [1]. However,material aspects are still subject of intense research, since most FEBIP/FIBIDmaterials notoriously suffer from high carbon contents of up to 90 at.% after initialfabrication. This sometimes reduces or even entirely masks the intendedfunctionalities[2], making them less attractive for specific applications.

M3 - Conference paper

SP - 23

EP - 24

BT - EUFN 2023

T2 - 6th European FIB Network Workshop 2023

Y2 - 7 June 2023 through 9 June 2023

ER -

Treat your Beam Induced Deposits well: Post-Processing Possibilities to Modify Material Properties

Abstract

Workshop

ASJC Scopus subject areas

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Fingerprint

Cite this