Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

Alberto Perrotta, Julian Pilz, Anna Maria Coclite

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 2 Nov 2017
Event	2017 AVS International Symposium & Exhibition - Tampa, United States Duration: 29 Oct 2017 → 3 Nov 2017

Conference	2017 AVS International Symposium & Exhibition
Abbreviated title	AVS 2017
Country/Territory	United States
City	Tampa
Period	29/10/17 → 3/11/17

Keywords

@conference{0135214180e449bbb35fddb00b9dc2e6,

title = "Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition",

keywords = "Zinc Oxide",

author = "Alberto Perrotta and Julian Pilz and Coclite, {Anna Maria}",

year = "2017",

month = nov,

day = "2",

language = "English",

note = "2017 AVS International Symposium & Exhibition, AVS 2017 ; Conference date: 29-10-2017 Through 03-11-2017",

}

TY - CONF

T1 - Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

AU - Perrotta, Alberto

AU - Pilz, Julian

AU - Coclite, Anna Maria

PY - 2017/11/2

Y1 - 2017/11/2

KW - Zinc Oxide

M3 - (Old data) Lecture or Presentation

T2 - 2017 AVS International Symposium & Exhibition

Y2 - 29 October 2017 through 3 November 2017

ER -