Understanding wafer patterns in semiconductor production with variational auto-encoders.

Tiago Teixeira dos Santos, Roman Kern

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	Proc. 26th European Symp. on Artificial Neural Networks, Computational Intelligence and Machine Learning (ESANN)
Publication status	Published - 2018

Cite this

@inproceedings{ec895dd0b00f4b56b11d552454a0c724,

title = "Understanding wafer patterns in semiconductor production with variational auto-encoders.",

author = "{Teixeira dos Santos}, Tiago and Roman Kern",

year = "2018",

language = "English",

booktitle = "Proc. 26th European Symp. on Artificial Neural Networks, Computational Intelligence and Machine Learning (ESANN)",

}