Universal software for the real-time control of sequential processing techniques

Julian Pilz; Martin Tazreiter; Anna Maria Coclite

doi:10.1116/1.5125052

Universal software for the real-time control of sequential processing techniques

Julian Pilz, Martin Tazreiter, Anna Maria Coclite

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	063201
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	37
Issue number	6
DOIs	https://doi.org/10.1116/1.5125052
Publication status	Published - 1 Nov 2019

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Cooperations

NAWI Graz

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10.1116/1.5125052Licence: CC BY 4.0

Cite this

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title = "Universal software for the real-time control of sequential processing techniques",

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Universal software for the real-time control of sequential processing techniques

ASJC Scopus subject areas

Cooperations

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