Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism

Melanie Wolf, [No Value] Fischer R

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	German
Publication status	Published - 14 Nov 2012
Event	2nd LAM Research Technology Seminar - Graz, Austria Duration: 14 Nov 2012 → 14 Nov 2012

Conference	2nd LAM Research Technology Seminar
Country/Territory	Austria
City	Graz
Period	14/11/12 → 14/11/12

Fields of Expertise

@conference{9dd68245ef7c407dbf8551fd76fdb7b3,

title = "Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism",

author = "Melanie Wolf and {Fischer R}, {[No Value]}",

year = "2012",

month = nov,

day = "14",

language = "deutsch",

note = "2nd LAM Research Technology Seminar ; Conference date: 14-11-2012 Through 14-11-2012",

}