X-ray Lithography: fundamentals and applications

Massimo Tormen, Gianluca Grenci, Benedetta Marmiroli, Filippo Romanato

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Fields of Expertise

@inbook{7264783efabf4960be59872ab15d016b,

title = "X-ray Lithography: fundamentals and applications",

author = "Massimo Tormen and Gianluca Grenci and Benedetta Marmiroli and Filippo Romanato",

year = "2011",

language = "English",

isbn = "978-1-84821-211-4",

pages = "1--325",

booktitle = "Nanolithography",

publisher = "ISTE-Wiley",

edition = "1",

}