TY - JOUR
T1 - Controlled Morphological Bending of 3D-FEBID Structures via Electron Beam Curing
AU - Weitzer, Anna
AU - Winkler, Robert
AU - Kuhness, David
AU - Kothleitner, Gerald
AU - Plank, Harald
N1 - Funding Information:
Financial support by the Austrian Federal Ministry for Digital and Economic Affairs and the National Foundation of Research, Technology and Development is gratefully acknowledged by R.W., D.K. and H.P. (Christian Doppler Laboratory DEFINE). All authors acknowledge the infrastructure support by the Austrian Centre of Electron Microscopy and the Austrian Cooperative Research.
Funding Information:
The financial support by the Austrian Federal Ministry for Digital and Economic Affairs and the National Foundation for Research, Technology and Development is gratefully acknowledged by A.W., R.W., D.K. and H.P. All authors thank Ferdinand Hofer, Lukas Seewald, Michele Brugger-Hatzl, Georg Haberfehlner and Verena Reisecker for fruitful discussions and creative inputs.
Publisher Copyright:
© 2022 by the authors.
PY - 2022/12
Y1 - 2022/12
N2 - Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in a targeted manner by local irradiation without precursor gas present. This process diminishes the volumes of exposed regions and alters nano-grain sizes, which was comprehensively characterized by SEM, TEM and AFM and complemented by Monte Carlo simulations. For obtaining controlled and reproducible conditions for smooth, stable morphological bending, a wide range of parameters were varied, which will here be presented as a first step towards using local EBC as a tool to realize even more complex nano-architectures, beyond current 3D-FEBID capabilities, such as overhanging structures. We thereby open up a new prospect for future applications in research and development that could even be further developed towards functional imprinting.
AB - Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in a targeted manner by local irradiation without precursor gas present. This process diminishes the volumes of exposed regions and alters nano-grain sizes, which was comprehensively characterized by SEM, TEM and AFM and complemented by Monte Carlo simulations. For obtaining controlled and reproducible conditions for smooth, stable morphological bending, a wide range of parameters were varied, which will here be presented as a first step towards using local EBC as a tool to realize even more complex nano-architectures, beyond current 3D-FEBID capabilities, such as overhanging structures. We thereby open up a new prospect for future applications in research and development that could even be further developed towards functional imprinting.
KW - 3D nanoprinting
KW - additive manufacturing
KW - direct-write nano-fabrication
KW - electron beam curing
KW - electron trajectory simulations
KW - focused electron beam induced deposition
KW - metal nanostructures
KW - post processing
UR - http://www.scopus.com/inward/record.url?scp=85143677995&partnerID=8YFLogxK
U2 - 10.3390/nano12234246
DO - 10.3390/nano12234246
M3 - Article
AN - SCOPUS:85143677995
SN - 2079-4991
VL - 12
JO - Nanomaterials
JF - Nanomaterials
IS - 23
M1 - 4246
ER -