Evaluation of thermal and growth stresses in heteroepitaxial AlN thin films formed on (0001) sapphire by pulsed laser ablation

J. Keckes, S. Six, W. Tesch, Roland Resel, B. Rauschenbach

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@article{8a15514ba3084aa9b622647354d44bad,

title = "Evaluation of thermal and growth stresses in heteroepitaxial AlN thin films formed on (0001) sapphire by pulsed laser ablation",

author = "J. Keckes and S. Six and W. Tesch and Roland Resel and B. Rauschenbach",

year = "2002",

language = "English",

volume = "240",

pages = "80--86",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

number = "1-2",

}

TY - JOUR

T1 - Evaluation of thermal and growth stresses in heteroepitaxial AlN thin films formed on (0001) sapphire by pulsed laser ablation

AU - Keckes, J.

AU - Six, S.

AU - Tesch, W.

AU - Resel, Roland

AU - Rauschenbach, B.

PY - 2002

Y1 - 2002

M3 - Article

SN - 0022-0248

VL - 240

SP - 80

EP - 86

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-2

ER -