Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Seiten (von - bis)	1675-1688
Fachzeitschrift	Applied Physics A: Materials Science and Processing
DOIs	https://doi.org/10.1007/s00339-014-8496-y
Publikationsstatus	Veröffentlicht - 2014

Fields of Expertise

Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → …
Projekt: Foschungsprojekt

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title = "Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds",

author = "Robert Winkler and Barbara Geier and Harald Plank",

year = "2014",

doi = "10.1007/s00339-014-8496-y",

language = "English",

pages = "1675--1688",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

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TY - JOUR

T1 - Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds

AU - Winkler, Robert

AU - Geier, Barbara

AU - Plank, Harald

PY - 2014

Y1 - 2014

U2 - 10.1007/s00339-014-8496-y

DO - 10.1007/s00339-014-8496-y

M3 - Article

SN - 0947-8396

SP - 1675

EP - 1688

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

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