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Focused Particle Beam Induced Processing Revisited: the Influence of Process Parameters
Plank, H.
(Speaker)
Institute of Electron Microscopy and Nanoanalysis (5190)
Activity
:
Talk or presentation
›
Invited talk at conference or symposium
›
Science to science
Period
3 Jul 2008
→
4 Jul 2008
Event title
3. FIB Workshop
Event type
Conference
Location
Luzern, Switzerland
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Keywords
Nanofabrication
Additive Manufacturing