Crystallographic Orientation and Phase Analysis in SEM

EBSD (electron backscatter diffraction) in the scanning electron microscope enables the identification of the crystal phase of microstructures and the determination of the orientation of individual crystallites. By scanning the specimen across selected areas of the specimen one obtains a full microstructural record of these areas. This additionally enables texture analysis. Within the frame of the project an EBSD - system will be installed, tested, and the necessary preparation methods will be developed. Application to steels, ceramics, semiconductors, thin layers on substrates, phase analysis of particles.