@article{8adc7e282fd14e2dbd719b2137323d6b,
title = "A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films",
author = "Heinz-Georg Flesch and Oliver Werzer and Martin Weis and Jan Jakabovic and Jaroslav Kovac and Daniel Hasko and Georg Jakopic and Wondergem, {Harry J} and Roland Resel",
year = "2009",
doi = "10.1002/pssa.200881616",
language = "English",
volume = "206",
pages = "1727--1730",
journal = "Physica Status Solidi (A) - Applications and Materials Science ",
issn = "1862-6319",
publisher = "Wiley-VCH ",
number = "8",
}